Semi-automatic electric control instruction
1.Core system controller
The system adopts PLC industrial color Touch Panel, therefore, it has the simple structure,the characteristic of this system is saving power, less radiation, high reliability, less possibility for system crash. Meanwhile, the PLC and the touch panel working independtly, only using one cable to connect the system.
2.control system
The system can semi-automatically pull the monocrystalline according to the controllers instruction, it is easy to control. Also the controller can modify the instruction using the touch panel anytime. The automatic system can working step by step, it can also working continuously. Adding the power control system on the closed-loop power, and signal fault diagnostic function can eliminate the pollution of the observation window, signal interference, heating-power failure, heaters short-circuit, heater resistance mutations, and manually input errors,etc.
3.Workstation Monitoring System
The system also has workstations configured monitoring system, the system with one PC machine can simultaneously monitor 8 monocrystalline furnaces, using RS 422 high-speed communication system, photoelectric isolation, highly reliable.
4.Electrical hardware Setting
The layout of the electrical cabinet of this system using modular centralized management. Each modular using simple connection, and single modular can be repaired with independently charged. Motor protection using the combination of the air switches and fuse, ease of operation and maintenance. Meanwhile, the main electrical point can be easy to identify on the terminal board. The machine containers layout is quite reasonable and brief. Also, the system has a two-color lights sound and light alarm system.
Crystal Seed Growth and Rotation Parts: First, the system keeps stable when crystal seed axis rotating in a high speed. Crystal seed rotating and pulling airproof both use high quality magnetic fluid components, which have no leakage, and a long time usage; Second, in order to keep system running well, the precise spline axis and driving DC servo motor are all imported parts. Last but not the least, pulling head has to go through strict static-balance and dynamic-balance test, and shaking range of crystal seed under high speed rotation must be less than 2mm, which could suit the requirement of the semiconductors process.
Crucible Movement and Rotation Parts: It uses huge cast iron upright postdual scroll linear navigationprecision ball screw and imported precise reducer to ensure crucible system running perfectly under overweight and ultra low speed condition.
Floating flap valve locate in between main chamber and pulling chamber, which can still maintain thermal field temperature in certain degree, remove the crystal, the replacement of crystal seed and supplementary feeding for continuous crystal pulling.
